XCALIPR CORPORATION

Capabilities

XCALIPR Corporation provides advanced Z-scanning laser photo-reflectance measurement technology for the precise, non-contact characterization of the electronic transport properties of semiconductor materials. The non-contact characterization of such semiconductor electronic transport properties is a long-standing problem in high-volume semiconductor device manufacturing. By enabling early process diagnostics, including process step isolation and rapid information turn around, the XCALIPR technology can be used to quickly improve yield learning and reduce manufacturing costs. The XCALIPR technology is quantitatively superior to other available techniques in terms of measurement sensitivity, acquisition time, spatial resolution, and system simplicity, and fully enables the non-contact evaluation of electronic transport properties directly on device wafers.