XPS System (X-Ray Photoelectron Spectroscopy System)

NIST is acquiring an advanced XPS system with HAXPES and small area imaging to boost its CHIPS Metrology Program. This tool will analyze surface and chemical composition (including interfaces up to 30 nm), probe material properties during packaging, and study electronic structure. Key features include HAXPES for deeper analysis (over 20 nm), GCIB for gentle cleaning, and in-situ capabilities for surface modification and electronic structure study. This upgrade will significantly enhance NIST's surface analysis capabilities for current and future projects.

Estimated value

$2M - $4.9M

Contract type

Unknown

• NAICS334413
• PSC334413