Optical Frequency Comb System (far-IR)

We will create measurement technology, reference data and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts-per-billion (<1 ppb) levels. Results will drive partners to develop industry-ready reference materials, point-of-use diagnostics and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials and documentary standards.

Estimated value

$250K - $499K

Contract type

Unknown

• NAICS334413
• PSC334413