Acquisition GatewayForecast64926
Nanocalorimetry for Semiconductors and Semiconductor Process Metrology
Department of Commerce · MD
- Est. solicitation
- —
- Date posted
- —
- Source
- Open forecast
Description
Obtain technical services to support nanocalorimeter-based semiconductor process metrology for atomic layer deposition (ALD). The Contractor shall implement and develop chip-based nanocalorimeter sensors for ALD process diagnostics, including operation and maintenance of ALD equipment, vacuum systems, calorimetric and optical instrumentation, data collection systems, thermal and optical data analysis, thermochemical modeling, deposited film analysis, and preparation of technical materials for NIST review and dissemination.
Planning details
- Estimated value
- $250K - $499K
- Contract type
- Unknown
Classifications
- NAICS541690
- PSC541690