Laser Induced Breakdown Spectroscopy (LIBS) and Laser Ablation Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) tandem instrument

We will develop new Standard Reference Materials (SRMs), Reference Materials (RMs), and Research Grade Test Materials (RGTMs) of high-purity solids currently lacking in chips manufacturing, enabling more effective, efficient, and comparable characterizations of source materials, as well as process control improvements. To achieve these goals, we will develop new NIST capabilities in glow discharge mass spectrometry (GDMS) and laser-based analytical methods, and we will significantly lower detection limits for existing NIST nuclear techniques. Technology transfer will enable U.S. industry to establish new measurement capabilities in their own facilities, and NIST will provide access to the newly established NIST measurement facilities via suitable collaborative agreements

Estimated value

$500K - $999K

Contract type

Unknown

• NAICS334413
• PSC334413