CHIPS R&D: Atom Probe Tomography Chamber GCPN 2.04

In response to the CHIPS for America Act, this procurement supports NIST's mission to perform and develop the measurement science required by the domestic semiconductor industry. The Material Measurement Laboratory (MML) will use the instrument to characterization materials, allowing scientists to make direct correlations between material processing, (nano)structure, and resulting properties.A primary mission-critical focus of this acquisition is to:1) Study the effect of laser wavelength on semiconductor materials to characterize and quantify sources of measurement bias and uncertainty.2) Ameliorate these uncertainties to improve the accuracy, repeatability, and reproducibility of atom probe tomography (APT) measurements.3) Develop new measurement science through three-dimensional (3D) atomic imaging of nanoscale samples.

Estimated value

$2M - $4.9M

Contract type

Unknown

• NAICS334413
• PSC334413